Koutsoureli, M. Xavier, S. Michalas, L. Lioutas, C. Bansropun, S. Papaioannou, G. Ziaei, A., Electrical properties of nanostructured SiN films for MEMS capacitive switches, Journal of Micromechanics and Microengineering, (27), 2017, INSTITUTE OF PHYSICS PUBLISHING, 0960-1317, 1361-6439