Zaghloul, U. Bhushan, B. Pons, P. Papaioannou, G. J. and Coccetti, F. Plana, R., On the influence of environment gases, relative humidity and gas
purification on dielectric charging/discharging processes in
electrostatically driven MEMS/NEMS devices, Nanotechnology Perceptions, (22), 2011, IOP Publishing Ltd,