@masterthesis{2701773, title = "SIMULATION OF NANOSCALE ROUGHNESS EVOLUTION OF SILICON SURFACES UNDER CHLORINE PLASMAS", authorField = "Αντωνίου, Ηρώ-Μαρία", year = "2018", school = "Εθνικό και Καποδιστριακό Πανεπιστήμιο Αθηνών" }