Ολοκληρωμένη συστοιχία αισθητήρων βασισμένη σε πολυμερή για την αναγνώριση πτητικών αερίων

Doctoral Dissertation uoadl:1309238 417 Read counter

Unit:
Κατεύθυνση Επιστήμη Πολυμερών και Εφαρμογές της
Library of the School of Science
Deposit date:
2012-06-20
Year:
2012
Author:
Οικονόμου Πέτρος
Dissertation committee:
Νικόλαος Χατζηχρηστίδης Ομότιμος Καθηγητής (Επιβλέπων), Ιωάννης Ράπτης Ερευνητής Β Ε.ΚΕ.Φ.Ε Δημόκριτος, Ερμής Ιατρού Αναπλ. Καθηγητής,
Original Title:
Ολοκληρωμένη συστοιχία αισθητήρων βασισμένη σε πολυμερή για την αναγνώριση πτητικών αερίων
Languages:
Greek
Summary:
In this research the sensor type of planar InterDigitated Capacitors (IDCs),
also known as chemcapacitors, is demonstrated and its application in the
detection of Volatile Organic Compounds (VOCs) and humidity is explored. The
IDC layout configuration is studied by using a dedicated electromagnetic model
and the behavior of different planar IDE structures/geometries coated with
different polymeric materials of different dielectric permittivity values (εp)
is determined. This study leads to the optimum design geometry of the planar
IDCs that will be used for the detection of analytes.
In order to identify the more suitable sensing materials for the targeted
application, a methodology based on swelling measurements of the polymeric
material upon exposure to analytes of interest was developed and applied in the
prediction of the response of a chemcapacitor upon exposure to different VOCs.
The integrated sensor array is characterized by the responses of each sensor to
exposure to several pure analytes, binary mixtures of analytes and complex
environments. Several parameters were examined such as sensitivity,
selectivity, limit of detection, aging. Also the total response of the sensor
array is analyzed by conjunction of the individual responses of each sensor and
the use of suitable Principal Component Analysis, PCA, models that have been
developed.
Fabrication of a hybrid low-power gas sensing module is presented. This module
is realized with integration on the same device of the sensor array with the
appropriate electronic elements. The latter provide the power, control and
read-out electronics of the output signal. The proposed hybrid micro-device is
characterized in terms of the response of each sensor of the sensor array upon
exposure to different pure analytes and their binary mixtures. Evaluation of
the results obtained by the characterization of the hybrid gas sensing module
demonstrate the ability of use such a device in analytical methods under
conditions of constant or alterable concentration of VOCs/humidity or their
mixtures in applications either at constant temperature or at temperature
changing over time simulating that way real time applications.
Keywords:
Planar InterDigitated capacitors , Chemcapacitors , Modeling, Response characterization, Hybrid gas sensing
Index:
Yes
Number of index pages:
1-10
Contains images:
Yes
Number of references:
219
Number of pages:
237

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