Unit:
Κατεύθυνση Τεχνολογίας Ολοκληρωμένων ΚυκλωμάτωνΠληροφορική
Author:
Politakis Dimitrios
Supervisors info:
Γεώργιος Κόκκορης, Συνεργαζόμενος Ερευνητής, Ινστιτούτο Νανοεπιστήμης & Νανοτεχνολογίας, ΕΚΕΦΕ Δημόκριτος
Original Title:
Προσομοίωση πλάσματος τύπου τζετ σε αντιδραστήρα χωρητικής σύζευξης
Translated title:
Simulation of atmospheric pressure plasma jet in a capacitively coupled reactor
Summary:
Atmospheric pressure plasma (APP) reactors are used in biomedicine, in surface treatment of materials, and film deposition. A category of APP reactors are plasma jet reactors.
The aim of this work is the calculation of the densities of the active species produced in a plasma jet produced by capacitive coupling at RF. A mathematical model consisting of two sub-models is developed: The plasma sub-model (solved in area between the electrodes of the reactor) and the neutral species sub-model which are solved decoupled to reduce the computational cost. This decoupling is based on the approximation that electrons and ions do not escape the area between the electrodes because the electric field is perpendicular to the direction of the gas flow. A commercial code is utilized for the numerical solution.
The model is applied to He plasma with low O2 impurity (<1.2%). The results of the plasma sub-model are evaluated by a comparison with simulation results from the literature. It is predicted that >1% in O2 impurity inhibits plasma generation. The results of the sub-model for the neutral species, and in particular the densities of the O and O3, are evaluated by a comparison with mass spectrometer data from the literature.
Main subject category:
Technology - Computer science
Keywords:
plasma jet, simulation, plasma model, capacitively coupled plasma reactor, atmospheric pressure plasma
